High purity Cleaning for Semiconductors and Precision Optics
Cleanliness is crucial. At every stage of the process.
Whether semiconductors or high-performance optics: purity is much more than just a functional requirement here. Molecular contamination, outgassing behaviour, ionic residues and material-induced interactions directly influence the stability of your processes in the nanometre range. Even minimal contamination affects subsequent processes, first-pass success, long-term stability and the cost-effectiveness of highly complex manufacturing.
Cleanroom and high-vacuum requirements make high-purity cleaning a qualifying component of demanding process chains.
Understanding processes. Designing purity. At MAFAC, we design a system architecture
specifically tailored to reliably achieve the highest levels of purity. Precisely controlled process management achieves reproducible technical cleanliness – and thus qualifies your parts for use in the highest cleanroom classes and vacuum-critical environments. At the same time, the process is designed to fit seamlessly into your production and quality assurance systems.
Limit values count. Knowledge and experience count more.
High-purity cleaning with MAFAC means more than just complying with specific limit values. We understand the interactions between materials, surface conditions, cleaning chemicals and the process environment – and consistently apply this knowledge to plant architecture and process control. With our technological and methodological expertise and experience in sensitive applications, we are an equal partner for component and parts suppliers, system providers and OEMs.
- Ensure validatable and audit-proof process control.
As a closed, documentable complete system comprising cleaning, drying, media management and handling. - Protect functionally critical precision surfaces. Gentle yet thorough cleaning for optical surfaces, structurally critical materials and coated components.
- Precisely achieve defined degrees of drying. Until absolutely dry and ready for sensitive follow-up processes, cleanroom handling and logistics.
- Develop robust, high-purity cleaning processes in advance. Multi-stage process design with validated cleaning results, directly transferable to the production environment.
- Reliably meet the most extreme purity requirements. Remove particulate, filmic, organic, ionic and molecular contaminants – even in the sub-micrometre and nanometre range.
- Targeted avoidance of back and cross contamination. Controlled process conditions with defined air and water flow and clear separation of sensitive process steps.
Achieving and verifying purity.
The highest technical cleanliness (high-purity cleaning) with MAFAC is measurable and verifiable:
in line with relevant standards, established test procedures and customer-specific specifications.
| Residues / Criteria | Standards / Test reference |
|---|---|
| Particulate residues | ISO 14644 (clean room), VDA 19 / ISO 16232 (test methodology), customer-specific particle limits |
| Film residues | TOC analysis, OEM specifications |
| Organic residues | TOC / THC, OEM specifications |
| Ionic impurities | IC analysis (ion chromatography), OEM specifications |
| Molecular contamination (AMC) | SEMI standards (e.g. SEMI F21), OEM specifications |
| Outgassing / vacuum compatibility | RGA (residual gas analysis), UHV specifications |
| Cleanroom integration | ISO 14644, customer-specific cleanroom classes |
Typical Applications
Reproducible purity results from the right process: based on our patented technologies. Precisely tailored to your target application.
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Technology and Process Expertise
Reproducible cleanliness comes from the right process: based on our patented technologies. Precisely tailored to your target application.
>> See Cleaning Technologies
Case study
Read here how MAFAC implemented a high-purity cleaning process for a strategic partner of OEMs and Tier 1 applications.
>> read Article
How does MAFAC integrate cleaning processes into cleanroom-compatible and highly automated process chains?
MAFAC integrates cleaning and drying systems into the production architecture as closed, contamination-controlled modules. Loading is carried out via encapsulated, automated material flow systems. We tunnel transfer areas with laminar flow units and create overpressure zones with filtered air. Back contamination at interfaces is prevented. We control critical zones through low-turbulence conditions and directed displacement flows.
How does MAFAC prevent back and cross-contamination?
We test all process steps under production-like conditions at the MAFAC Customer Centre. Cleaning takes place in a controlled environment with HEPA-filtered XCDA process air, treated ultrapure water quality and clearly defined material and media flows.